Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Seal Material

Nitrile

Anti Static

No

Red1000 Glass Fiber 5 micron (Beta 1000) Nitrile 6in 15.24cm (REPLACED BY HC2237FHP6Z)

Product ID: HC2237FDP6H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2237
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 22 micron (Beta 1000) Nitrile 15in 38.1cm (REPLACED BY HC2236FRT15)

Product ID: HC2236FCT15
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2236
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 1000
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This product is currently not available. Please contact us for more information.

ELEMENT CORALON HCT200FCS04H

Product ID: HCT200FCS04H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HCT200
Family
Versalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Discontinued

This part is no longer available. Please contact us for more information.

Ultipor III Glass Fiber 25 micron (Beta 1000) Nitrile 16in 40.64cm (REPLACED BY HC8400FRT16HY755)

Product ID: HC8400FKT16HY755
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8400
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 3 micron (Beta 1000) Nitrile 8in 20.32cm (REPLACED BY HC0101FRZ18Z)

Product ID: HC0101FCZ18H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0101
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
2.5 Micron, Beta 1000
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This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 12 micron (Beta 1000) Nitrile 8in 20.32cm (REPLACED BY HC8900FRS8Z)

Product ID: HC8900FKS8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 7 micron (Beta 1000) Nitrile 13in 33.02cm (REPLACED BY HC9400FRN13HYE)

Product ID: HC9400FKN13HYE
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9400
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 7 micron (Beta 1000) Nitrile 8in 20.32cm (REPLACED BY HC8800FRN8Z)

Product ID: HC8800FKN8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8800
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber Nitrile 4in 10.16cm (REPLACED BY HC9800FRD4Z)

Product ID: HC9800FKD4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9800
Family
Ultipor III
Filter Media
Glass Fiber
Nominal Length (Imperial)
4 in
Nominal Length (Metric)
10.16 cm
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This product is currently not available. Please contact us for more information.

Coralon Glass Fiber 5 micron (Beta 1000) Nitrile 39in 99.06cm length (REPLACED BY HC0363FRP39Z)

Product ID: HC0363FCP39H
Unit of Measure
1/EA
Min Order Qty
8
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0363
Family
Coralon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 25 micron (Beta 1000) Nitrile 13in 33.02cm (REPLACED BY HC9600FRT13Z)

Product ID: HC9600FKT13H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9600
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
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This product is currently not available. Please contact us for more information.

Ultipor Glass Fiber 7µm Nitrile Seal 18in 45.72cm length

Product ID: HC2618FKR18H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes
186 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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