Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Cartridge Length (Imperial)

40 in

Product Type

Filter Cartridges

Filter Media

Polypropylene

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 Inches, Nitrile

Product ID: PFT3040UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: NXT20040UM3N
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
200 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 Inches, silicone, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 Inches, silicone, SOE fin end external 222 O-rings

Product ID: PFT340USM89359
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer

Product ID: NXA140UM3V
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 Inches, EPDM, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 Inches, EPDM, SOE fin end external 222 O-rings

Product ID: PFT3040UEM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, EPDM, DOE with elastomer gasket seals & end caps

Product ID: CLR140DOEE
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
EPDM
See All Attributes

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, SOE plastic spring assembly saw cut end

Product ID: NXA540UXK
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 40 inches, Nitrile

Product ID: NXA0540UDOEN
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps)

Product ID: NXT1040U664
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT2040UM7S
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 Inches, Silicone Elastomer, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 Inches, Silicone Elastomer, SOE fin end external 222 O-rings

Product ID: PFT540USM8W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT540UM3E
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron
215 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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