Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

DFT Classic®, Filter Cartridges, Removal Rating 150 μm, Length 20 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 150 μm, Length 20 Inches, Polypropylene

Product ID: U150AW20U
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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Duo-Fine® , Filter Cartridges, Removal Rating 0.45 μm, Length 10 Inches, No Oring required M2 style only, SOE flat closed end fits housings with 020 O-ring post

Product ID: DFNT04510UXM2
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.45 µm
End Configuration
SOE flat closed end, fits housings with 020
Change Out Differential Pressure
2.4 bard

Profile® Nylon, Filter Cartridges, Removal Rating 40 μm, Nylon, Length 20 Inches

Product ID: RGN2FN400NPL
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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S/W FILTER CRTDG, FDA POLYPROPYLENE, 10U

Product ID: FF FFP10R30P
Unit of Measure
15/EA
Min Order Qty
15

Junior Filter HDC II 4.5µm

Product ID: MCY4463J045J
Unit of Measure
12/EA
Min Order Qty
12
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 Inches, EPDM, SOE fin end external 225 O-ring product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 Inches, EPDM, SOE fin end external 225 O-ring

Product ID: PFT1040UEM22
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm

40IN 5UM CODE 8

Product ID: 40IN5UMCODE8
Unit of Measure
1/EA
Min Order Qty
1

Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 4 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: XLD34UEM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
EPDM
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MCC1401E100H13 226

Product ID: MCC1401E100H13226
Unit of Measure
6/EA
Min Order Qty
6

Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXA310UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXA2030U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
20 micron
DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 10 Inches, 316 stainless steel, with Extended Core product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 10 Inches, 316 stainless steel, with Extended Core

Product ID: U050A10SEC1S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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3,691 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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