Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

10 in

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 226 O-rings, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 226 O-rings, No Bubble Test

Product ID: PFT510USM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 316 stainless steel, with Core Cover product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 316 stainless steel, with Core Cover

Product ID: C001A10SC
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 10 Inches, White nitrile gaskets product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 10 Inches, White nitrile gaskets

Product ID: PFT0210UW
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: PFT310UVM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: PFT02510UVM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 10 Inches, Electrolytic tin plated steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 10 Inches, Electrolytic tin plated steel

Product ID: C003A10T
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXT5010UH21
Unit of Measure
30/EA
Min Order Qty
30
Micron
50 micron
Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring product photo

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring

Product ID: NXT2010UM18F
Unit of Measure
60/EA
Min Order Qty
60
Micron
20 micron

DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 10 Inches, 304 stainless steel

Product ID: C030A10A
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
30 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 10 inches

Product ID: NXA3010UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
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Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: R1F005TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
R type housing
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Duo-Fine® , Filter Cartridges, Removal Rating 0.45 μm, Length 10 Inches, Nitrile

Product ID: DFN04510AN
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.45 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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566 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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