Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Sub Type

Pleated Filters

Product Type

Filter Cartridges

Profile® Nylon, Filter Cartridges, Removal Rating 7 μm, Nylon, Length 20 Inches

Product ID: RGN2F070AOC
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
7 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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MPDF 1-40VEE

Product ID: MPDF140VEE
Unit of Measure
1/EA
Min Order Qty
1

5ESC10770-3U400ZJ-049

Product ID: 5ESC107703U4S00002
Unit of Measure
1/EA
Min Order Qty
1

20IN 1UM DOE

Product ID: 20IN1UMDOE
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.

Filter 10" HDC II 10µm

Product ID: AB1J1003H4
Unit of Measure
6/EA
Min Order Qty
6

MCS1001ECH

Product ID: MCS1001ECH
Unit of Measure
6/EA
Min Order Qty
6

PUY2U001ZJ

Product ID: PUY2U001ZJ
Unit of Measure
1/EA
Min Order Qty
1

5ESC10770-2U200ZJ-051

Product ID: 5ESC107702U2S00002
Unit of Measure
1/EA
Min Order Qty
1

DFA3001J400

Product ID: DFA3001J400
Unit of Measure
1/EA
Min Order Qty
1

5ESC10770-2U010ZJ-007-ND

Product ID: 5ESC107702U0S00025
Unit of Measure
1/EA
Min Order Qty
1

Duo-Fine® II, Filter Cartridges, Removal Rating 3 μm, Length 30 Inches

Product ID: DFPT330ETM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration Code
M3
End Configuration
SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0)3
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HDC® II Filter Cartridges, Removal Rating 20 μm, Length 20 inches, silicone

Product ID: AB2J2007H4
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
20 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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737 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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