Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Product Type

Filter Cartridges

Gasket / O-Ring Material

EPDM

Filter Media

Polypropylene

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 222 O-rings

Product ID: PFT04530UEM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE fin end external 222 O-rings

Product ID: CLR1040M8E
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
EPDM
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 226 O-rings

Product ID: PFT3030UEM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 40 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 40 Inches, EPDM, DOE industrial

Product ID: PFT04540UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, EPDM, SOE with internal O-rings (same as M10) closed end with deep recess product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, EPDM, SOE with internal O-rings (same as M10) closed end with deep recess

Product ID: NXT110UM20E
Unit of Measure
30/EA
Min Order Qty
30
Micron
1 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 40 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 40 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT240UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 5 Inches product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 5 Inches

Product ID: PFT55UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 20 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 20 Inches, EPDM, DOE industrial

Product ID: PFT0820UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-ring

Product ID: CLR1040M18E
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
EPDM
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 226 O-rings, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 226 O-rings, No Bubble Test

Product ID: PFT1030UEM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm

Poly-Fine® XLD Filter Cartridges, Polypropylene, Length 30 inches, EPDM, DOE industrial

Product ID: XLD3030UE
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
EPDM
End Configuration Code
Blank
See All Attributes

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, EPDM, DOE with elastomer gasket seals & end caps

Product ID: CLR520DOEE
Unit of Measure
48/EA
Min Order Qty
48
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
See All Attributes
244 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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