Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Oil & Gas

Product Type

Filter Cartridges

Filter Media

Polypropylene

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: RM1F150H21TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
15 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches

Product ID: CLR2030
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
20 micron

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT5050UM3V813
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
50 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
End Configuration
M3 - SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0)4
Cartridge Type
NXT
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Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, silicone, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXT320UM3S
Unit of Measure
12/EA
Min Order Qty
12
Micron
3 micron
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 39 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 39 inches

Product ID: NXA139UM18E
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: RM1F700H21TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
70 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, 316 stainless steel

Product ID: P010RC30S395
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 inches, DOE Santoprene gasket seal

Product ID: NXT52925UH21
Unit of Measure
10/EA
Min Order Qty
10
Micron
5 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 Inches, Silicone Elastomer, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 Inches, Silicone Elastomer, SOE fin end external 222 O-rings

Product ID: PFT540USM8W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm

Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches, Timonium

Product ID: R2F400TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration
R type housing
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT540UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 40 inches

Product ID: NXT0540U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
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262 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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