Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Gasket / O-Ring Material

NA

Filter Media

Polypropylene

Nexis® A Series Filter Cartridges, Removal Rating 90 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXA9030U
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
90 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 120 μm, Polypropylene, Length 4 inches

Product ID: NXA1204U
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
120 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 9.875 inches

Product ID: CLR59875
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 inches product photo

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 inches

Product ID: NXT3020U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
30 micron

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 9.75 inches

Product ID: NXT50975U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXT2030UH21
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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NXT 1-4U product photo

Nexis, NXT, 1 μm, 10.2 cm (4 in), DOE industrial (no end caps)

Product ID: NXT14U
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron
Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 9.75 inches

Product ID: CLR1975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
1 micron

Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 19.5 inches

Product ID: NXT150195U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
150 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 19.5 inches, DOE Santoprene gasket seal

Product ID: NXT25195UH21
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
25 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 30 inches product photo

Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 30 inches

Product ID: NXT4030U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
40 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches

Product ID: NXT1030U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
10 micron
379 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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