Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Product Type

Filter Cartridges

Filter Media

Polypropylene

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: RM1F002H21NPL
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, silicone, DOE industrial, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, silicone, DOE industrial, No Bubble Test

Product ID: PFT1010US
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 226 O-rings

Product ID: PFT10975UEM6
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm

Poly-Fine® ARD, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches

Product ID: ARD1030USM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-ring

Product ID: NXT1010UM18V884
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 39 inches

Product ID: NXT1039U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
39 in
Cartridge Length (Metric)
991 mm
Cartridge Length (Metric)
99.1 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, EPDM, SOE with internal O-rings (same as M10) closed end with deep recess product photo

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, EPDM, SOE with internal O-rings (same as M10) closed end with deep recess

Product ID: NXT0510UM20E
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron

Profile® Star, FilterCartridges, Removal Rating 20 μm, Polypropylene, Length 30 Inches, silicone

Product ID: AB3A2007H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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This product is currently not available. Please contact us for more information.

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches

Product ID: CLR110
Unit of Measure
36/EA
Min Order Qty
36
Length
25.4 cm / 10 in
Micron
1 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE flat closed end external 222 O-rings

Product ID: PFT02520UTM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 27.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 27.25 inches

Product ID: NXT1502725UM18F
Unit of Measure
12/EA
Min Order Qty
12
Micron
150 micron

Nexis® T Filter Cartridges, Removal Rating 120 μm, Polypropylene, Length 19.5 inches

Product ID: NXT120195U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
120 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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This product is currently not available. Please contact us for more information.

1,351 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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