Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

DFT Classic®

Cartridge Length (Metric)

248 mm

DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 9.75 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 9.75 Inches, 304 stainless steel

Product ID: C003A975AC
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 9.75 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 9.75 Inches, 304 stainless steel, Bulk packaging

Product ID: C005A975A
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 9.75 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 9.75 Inches, 316 stainless steel, Bulk packaging

Product ID: C010A975S
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 9.75 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 9.75 Inches, Polypropylene

Product ID: C020A975U
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 9.75 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 9.75 Inches, 304 stainless steel

Product ID: C020A975A
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 25 μm, Length 9.75 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 25 μm, Length 9.75 Inches, 304 stainless steel

Product ID: C025A975A
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 9.75 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 9.75 Inches, 304 stainless steel

Product ID: C030A975A
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 9.75 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 9.75 Inches, 316 stainless steel

Product ID: G005A975S1PK
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 9.75 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 9.75 Inches, 316 stainless steel

Product ID: G010A975S1PK
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 25 μm, Length 9.75 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 25 μm, Length 9.75 Inches, 316 stainless steel

Product ID: G025A975S1PK
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Individually wrapped
See All Attributes

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 9.75 Inches, Polypropylene, Individually wrapped

Product ID: U005A975U1PK
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
5 µm
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 9.75 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 9.75 Inches, Polypropylene

Product ID: U010A975U
Unit of Measure
30/STK
Min Order Qty
30
Packaging
Bulk
See All Attributes
15 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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