Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Duo-Fine®

Duo-Fine® II, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFNT130UE
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration
Blank - DOE with elastomer gasket seals & end caps
Change Out Differential Pressure
2.4 bard
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Duo-Fine® II, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, Fluorocarbon Elastomer

Product ID: DFNT1040UVM18
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
Change Out Differential Pressure
2.4 bard
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Duo-Fine® , Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: DFNT140UVM8
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
End Configuration
SOE fin end, external 222 O-rings
Change Out Differential Pressure
2.4 bard

Duo-Fine® II, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, silicone, SOE fin end external 226 O-rings

Product ID: DFNT120USM7
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
End Configuration
SOE fin end, external 226 O-rings
Change Out Differential Pressure
2.4 bard

Duo-Fine® , Filter Cartridges, Removal Rating 0.45 μm, Length 10 Inches, No Oring required M2 style only, SOE flat closed end fits housings with 020 O-ring post

Product ID: DFNT04510UXM2
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.45 µm
End Configuration
SOE flat closed end, fits housings with 020
Change Out Differential Pressure
2.4 bard

DFNT-INEOS-10 121

Product ID: DFNTINEOS10121
Unit of Measure
12/EA
Min Order Qty
12

Duo-Fine® , Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, Fluorocarbon Elastomer, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFNT0230UV
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.2 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine®, Filter Cartridges, Removal Rating 3 μm, Length 40 Inches

Product ID: DFPT340EVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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GP 1-4U-X3S 246

Product ID: GP14UX3S246
Unit of Measure
1/EA
Min Order Qty
1

Duo-Fine® , Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN140UN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine®, Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, FluorocarbonElastomer, SOE flat closed end external 222 O-rings

Product ID: DFPT0230EVM3562
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 10 Inches, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFNT0210UE
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.2 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
Blank - DOE with elastomer gasket seals & end caps
Change Out Differential Pressure
2.4 bard
See All Attributes
198 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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