Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Epocel®

Product Sub Type

Pleated Filters

Product Type

Filter Cartridges

MCC1401HNTH

Product ID: MCC1401HNTH
Unit of Measure
12/EA
Min Order Qty
12

MCS1001EGH

Product ID: MCS1001EGH
Unit of Measure
6/EA
Min Order Qty
6

MCY1001J200H2

Product ID: MCY1001J200H2
Unit of Measure
24/EA
Min Order Qty
24

This product is currently not available. Please contact us for more information.

MCC1401E280H13

Product ID: MCC1401E280H13
Unit of Measure
6/EA
Min Order Qty
6

MCC1401U2-20ZH

Product ID: MCC1401U220ZH
Unit of Measure
6/EA
Min Order Qty
6
ELEMENT 12" EPOCEL EG 25 MICRON product photo

ELEMENT 12" EPOCEL EG 25 MICRON

Product ID: CA41083D02
Unit of Measure
1/EA
Min Order Qty
1
ELEMENT 8" EPOCEL EG 25 MICRON product photo

ELEMENT 8" EPOCEL EG 25 MICRON

Product ID: CA41077D02
Unit of Measure
1/EA
Min Order Qty
1

MCC1401E100H

Product ID: MCC1401E100H
Unit of Measure
6/EA
Min Order Qty
6
ELEMENT 6" EPOCEL EG 25 MICRON product photo

ELEMENT 6" EPOCEL EG 25 MICRON

Product ID: CA41078D02
Unit of Measure
1/EA
Min Order Qty
1

PUY1EEH13

Product ID: PUY1EEH13
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.

MCS1201ECH13

Product ID: MCS1201ECH13
Unit of Measure
6/EA
Min Order Qty
6

MCY1001U220ZH2

Product ID: MCY1001U220ZH2
Unit of Measure
24/EA
Min Order Qty
24
35 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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