Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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HDC®

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Filter Cartridges

CTRG BW HDC H050 C7 H 3H product photo

CTRG BW HDC H050 C7 H 3H

Product ID: BWAB3P050XHS
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CTRG BW HDC H400 C7 (4-HIGH) product photo

CTRG BW HDC H400 C7 (4-HIGH)

Product ID: BWAB4P400XHS
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CTRG BW HDC HS-40 C7 40

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DFA3001J100

Product ID: DFA3001J100
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CRTG DFA4001BN

Product ID: DFA4001BN
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CRTG DFA4001BNUL

Product ID: DFA4001BNUL
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DFA4001J400

Product ID: DFA4001J400
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CRTG DFA4201J200

Product ID: DFA4201J200
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CRTG DFA4201J100

Product ID: DFA4201J100
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CRTG DFA4201J060

Product ID: DFA4201J060
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CRTG DFA4201J045

Product ID: DFA4201J045
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CRTG DFA4201J400

Product ID: DFA4201J400
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140 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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