Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Nexis®

Product Sub Type

Depth Filters

Product Type

Filter Cartridges

A1449249

Product ID: A1449249
Unit of Measure
30/EA
Min Order Qty
30

A-1555 249

Product ID: A1555249
Unit of Measure
30/EA
Min Order Qty
30

A-9935 249

Product ID: A9935249
Unit of Measure
10/EA
Min Order Qty
10

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXA2010UM3E
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXA2010UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 222 O-rings

Product ID: NXT0520UM8S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXA510UM3E
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXT1010UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 29.25 inches

Product ID: NXT102925U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXA130U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
1 micron
NXT 0.5-20U product photo

Nexis, NXT, 0.5 μm, 50.8 cm (20 in), DOE industrial (no end caps)

Product ID: NXT0520U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
0.5 micron
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXT20010UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
200 micron
693 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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