Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Nexis®

Cartridge Length (Imperial)

20 in

Gasket / O-Ring Material

NA

Filter Media

Polypropylene

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: NXA120UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps)

Product ID: NXA120U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
1 micron

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 20 inches

Product ID: NXA2020U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps)

Product ID: NXA3020U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
30 micron

Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 inches, DOE 2.54 cm (1 in) extended core

Product ID: NXA3020U1X
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: NXA320UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps)

Product ID: NXA320U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
3 micron
Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 20 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 20 inches

Product ID: NXA4020U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
40 micron
NXA 50-20U product photo

Nexis, NXA, 50 μm, 50.8 cm (20 in), DOE industrial (no end caps)

Product ID: NXA5020U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
50 micron

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: NXA520UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps)

Product ID: NXA520U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
5 micron

Nexis® A Series Filter Cartridges, Polypropylene, Length 20 inches, DOE industrial

Product ID: NXA720U
Unit of Measure
12/EA
Min Order Qty
12
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
End Configuration Code
BLANK
See All Attributes
39 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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