Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Profile®

Industries

Microelectronics

Product Type

Filter Cartridges

R1F003

Product ID: R1F003TIMONIUM
Unit of Measure
24/EA
Min Order Qty
48

PUY1UY200H

Product ID: PUY1UY200H
Unit of Measure
1/EA
Min Order Qty
1

R3FYM

Product ID: R3FYMTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

PRS200H21

Product ID: PRS200H21
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

WF3P02018J

Product ID: WF3P02018JTIMONIUM
Unit of Measure
24/EA
Min Order Qty
24

Profile® Star Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, Ethylene Propylene, double O-ring with flat end

Product ID: AB2A0303J
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 3
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
See All Attributes

R2F150

Product ID: R2F150TIMONIUM
Unit of Measure
48/EA
Min Order Qty
48

R2F020

Product ID: R2F020TIMONIUM
Unit of Measure
24/EA
Min Order Qty
48

AB3UY0457H4

Product ID: AB3UY0457H4
Unit of Measure
1/EA
Min Order Qty
1

R4F100

Product ID: R4F100TIMONIUM
Unit of Measure
12/EA
Min Order Qty
12

R1F020

Product ID: R1F020TIMONIUM
Unit of Measure
24/EA
Min Order Qty
48

AB2P00319J

Product ID: AB2P00319JTIMONIUM
Unit of Measure
48/EA
Min Order Qty
48
109 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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