Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Ultipor®

Junior Filter Ultipor GF+ 2µm

Product ID: MCY4463U2-20ZH4
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

WCN80-20U001ZJ-MOD-G

Product ID: WCN8020U001ZJMODG
Unit of Measure
1/EA
Min Order Qty
1

WCN80-20-K0045ZJ

Product ID: WCN8020K0045ZJ
Unit of Measure
1/EA
Min Order Qty
1
ELEMENT 8" U6-40Z 5 MICRON product photo

ELEMENT 8" U6-40Z 5 MICRON

Product ID: CA41077D08
Unit of Measure
1/EA
Min Order Qty
1

Filter 20" Ultipor GF+ 10µm

Product ID: MCY1002U100ZH13
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Ultipor® N66 Filter Cartridges, Nylon Hardware, 0.45 µm Single Layer, 10 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: ABN1NB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
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Filtro 10" Ultipor GF+ 20µm product photo

Filtro 10" Ultipor GF+ 20µm

Product ID: MCY1001U200ZH13
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Ultipor® GF Plus, Filter Cartridges, Length 30 Inches

Product ID: AB3U2-20Z7H15
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket O-Ring Code
H15

This product is currently not available. Please contact us for more information.

20" Ultipor GF+ 1µm, DOE with EPR gaskets

Product ID: MCY1002U010ZJ
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

5ESC10770-2U100ZJ-105

Product ID: P1122631
Unit of Measure
1/EA
Min Order Qty
1

W8T-150-30-U6-40ZJ

Product ID: W8T15030U640ZJ
Unit of Measure
1/EA
Min Order Qty
1
Filter 10" Ultipor GF+ 2µm product photo

Filter 10" Ultipor GF+ 2µm

Product ID: AB1U2-20Z7H4
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

105 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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