Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Product Type

Housings, Vessels, and Assemblies

SUPRApak Housing Torque Unit Guide Bush

Product ID: ACS1043AA
Unit of Measure
1/EA
Min Order Qty
1

KIT ACS1050EA DN65 DIN 11851 GASKET

Product ID: ACS1050EA
Unit of Measure
1/EA
Min Order Qty
1

Suprapak Housing Torque Unit Clamp Nut

Product ID: ACS1044AA
Unit of Measure
1/EA
Min Order Qty
1

SUPRApak Housing Torque Unit Vented

Product ID: ACS1040AA
Unit of Measure
1/EA
Min Order Qty
1

Housing O-Ring Gen 2&3

Product ID: ACS1039EM
Unit of Measure
1/EA
Min Order Qty
1

IDL filter housing for one cartridge type 1000 series

Product ID: IDL11GN16J7
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
321 mm
Cartridge Lock
Tie rod & Seal nut
Cartridge Style
1000 series
Design Pressure (barg)
-1/17,9@-10/40°C -1/13,8@-10/150°C Barg / T°C
Housing Height (Metric)
362 mm
Nominal Diameter (Metric)
122 mm
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IDL13GN16J7

Product ID: IDL13GN16J7
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
822 mm
Cartridge Lock
V-band
Cartridge Style
1001 V-band
Design Pressure (barg)
17.9 @ 40°C
Diameter (Imperial)
4.81 in
Housing Height (Metric)
870 mm
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Stainless steel, 10", 1" NPT, EPR seal for DOE cartridge (without gasket)

Product ID: IDLD1GN16J
Unit of Measure
1/EA
Min Order Qty
1

IDL Filter Housing for One DOE 30 in. Cartridge DOE/RF V-band, 30 in, 1" NPT/ 1/4" NPT, Ethylene Propylene

Product ID: IDLD3GN16J
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Lock
V-band
Cartridge Style
DOE/RF V-band
Design Pressure (barg)
17.9 @ 40°C
Housing Height (Metric)
34.25 mm
Volume
4.3 L

IOL Filter Housing For One Cartridge Filter - 254 mm (10”)

Product ID: IOL71GN16J7
Unit of Measure
1/EA
Min Order Qty
1
Housing Height (Metric)
16.5 mm
Volume
1.6 L

EWHF16G89ZZJ

Product ID: EWHF16G89ZZJ
Unit of Measure
1/EA
Min Order Qty
1

Stand for Single round FBT housings

Product ID: FBT01STAND
Unit of Measure
1/EA
Min Order Qty
1
31 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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