Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Product Sub Type

String Wound Filters

Product Type

Filter Cartridges

Cartridge Length (Metric)

254 mm

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 304 stainless steel

Product ID: C001A10A
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 10 Inches, 304 stainless steel, Individually wrapped

Product ID: C005A10A1PK
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
5 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 10 Inches, Electrolytic tin plated steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 10 Inches, Electrolytic tin plated steel

Product ID: C005A10T
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 10 Inches, Polypropylene, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 10 Inches, Polypropylene, Bulk packaging

Product ID: C010A10U
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 10 Inches, Electrolytic tin plated steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 10 Inches, Electrolytic tin plated steel

Product ID: C010A10T
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Bleached cotton, Length 10 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Bleached cotton, Length 10 Inches, 316 stainless steel, Bulk packaging

Product ID: C010A10S
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 10 Inches, Polypropylene, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 10 Inches, Polypropylene, Individually wrapped

Product ID: C020A10U1PK
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 10 Inches, 304 stainless steel

Product ID: C030A10A
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
30 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 10 Inches, Electrolytic tin plated steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 10 Inches, Electrolytic tin plated steel

Product ID: C075A10T
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 10 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 10 Inches, 304 stainless steel

Product ID: C100A10A
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 200 μm, Length 10 inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 200 μm, Length 10 inches

Product ID: C200A10T
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 10 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 10 Inches, 316 stainless steel

Product ID: G005A10S1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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17 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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