Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Product Type

Filter Cartridges

STRINGWOUND FILTER

Product ID: FEP30R40P
Unit of Measure
15/EA
Min Order Qty
15

FF FBC100R20AE

Product ID: FF FBC100R20AE
Unit of Measure
1/EA
Min Order Qty
15

S/W FILTER CRTDG, BLEACHED COTTON, 100UM

Product ID: FF FBC100R30P
Unit of Measure
1/EA
Min Order Qty
15

S/W FILTER CRTRDG, BLEACHED COTTON, 100U

Product ID: FF FBC100R10P
Unit of Measure
30/EA
Min Order Qty
30

S/W FILTER CRTDG, BLEACHED COTTON, 20UM,

Product ID: FF FBC20R10T
Unit of Measure
30/EA
Min Order Qty
30

Discontinued

This part is no longer available. Please contact us for more information.

S/W FILTER CRTDG, BLEACHED COTTON, 10UM,

Product ID: FF FBC10R10S
Unit of Measure
30/EA
Min Order Qty
30

Filter, Cartridge, Stringwound, FDA Cott

Product ID: FF FBC100R4T
Unit of Measure
1/EA
Min Order Qty
15

Discontinued

This part is no longer available. Please contact us for more information.

S/W FILTER CRTDG, BLEACHED COTTON, 1UM,

Product ID: FF FBC1R10T
Unit of Measure
1/EA
Min Order Qty
1

FF FBC1R30A

Product ID: FF FBC1R30A
Unit of Measure
1/EA
Min Order Qty
15

S/W FILTER CRTDG, BLEACHED COTTON, 50um,

Product ID: FF FBC50R10S
Unit of Measure
15/EA
Min Order Qty
15

STRING WOUND BLEACHED COTTON 10UM 30”L 3

Product ID: FF FBC10R30A
Unit of Measure
15/EA
Min Order Qty
15

S/W FILTER CRTDG, BLEACHED COTTON, 20UM,

Product ID: FF FBC20R30S
Unit of Measure
15/EA
Min Order Qty
15
3,275 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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