Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Industrial Manufacturing

Product Type

Filter Cartridges

Product Use

Pre-Filtration

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 30 inches

Product ID: CLR7530
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
75 micron
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 9.75 inches

Product ID: CLR5975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
5 micron
Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 40 inches

Product ID: CLR7540
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
75 micron
Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 9.75 inches

Product ID: CLR75975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
75 micron
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, Nitrile product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, Nitrile

Product ID: NXA0510UM3N
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, EPDM, DOE with elastomer gasket seals and end caps product photo

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXA1030UDOEE
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXA110UH21
Unit of Measure
30/EA
Min Order Qty
30
Micron
1 micron
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXA130UM3S
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, DOE industrial (no end caps)

Product ID: NXA2010U
Unit of Measure
30/EA
Min Order Qty
30
Micron
20 micron
Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, EPDM, DOE with elastomer gasket seals and end caps product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXA2010UDOEE
Unit of Measure
60/EA
Min Order Qty
60
Micron
20 micron
Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXA2030U
Unit of Measure
12/EA
Min Order Qty
12
Micron
20 micron
Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches, EPDM product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches, EPDM

Product ID: NXA2040UM8E
Unit of Measure
12/EA
Min Order Qty
12
Micron
20 micron
666 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English