Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Product Type

Housings, Vessels, and Assemblies

Material of Construction

Aluminum|Cast Iron

Athalon, 400psi Simplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR619CD4040ZA9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
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Athalon, 400psi Duplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR669CF6440ZA9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
3 per side
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Athalon, 400psi Duplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR689CF6440ZG9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
4 per side
See All Attributes

Athalon, 400psi Simplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR699CD4040ZA9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

Athalon, 400psi Simplex Hsg, 2.5in Flange Ports, 20in Length, Fluorocarbon Seals

Product ID: UR699CD4020ZA9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

Athalon, 400psi Non-bypass Simplex Hsg, 2.5in Flange Ports, 20in Length, Fluorocarbon Seals

Product ID: UR699CD4020ZN9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

Athalon, 400psi Non-bypass Simplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR699CD4040ZN9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

UR699CF4020ZG9 ASSEMBLY HOUSING

Product ID: UR699CF4020ZG9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

UR619CA3220ZA9 ASSEMBLY HOUSING

Product ID: UR619CA3220ZA9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 400psi Simplex Hsg, 2in SAE Ports, 20in Length, Fluorocarbon Seals

Product ID: UR619CA3220ZG9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

UR619CA3240ZA9 ASSEMBLY HOUSING

Product ID: UR619CA3240ZA9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

UR619CA3240ZN9 ASSEMBLY HOUSING

Product ID: UR619CA3240ZN9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes
87 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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