Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Cartridge Length (Imperial)

20 in

Gasket / O-Ring Material

NA

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches

Product ID: CLR120
Unit of Measure
24/EA
Min Order Qty
24
Length
50.8 cm / 20 in
Micron
1 micron

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 inches

Product ID: CLR3020
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
See All Attributes
Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 20 inches product photo

Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 20 inches

Product ID: CLR5020
Unit of Measure
24/EA
Min Order Qty
24
Length
50.8 cm / 20 in
Micron
50 micron

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, SOE plastic spring assembly saw cut end

Product ID: CLR520XK
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
See All Attributes

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: CLR520H21
Unit of Measure
48/EA
Min Order Qty
48
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
See All Attributes
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches

Product ID: CLR520
Unit of Measure
24/EA
Min Order Qty
24
Length
50.8 cm / 20 in
Micron
5 micron

Nexis® A Series Filter Cartridges, Removal Rating 70 μm, Polypropylene, Length 20 inches

Product ID: NXA7020U
Unit of Measure
12/EA
Min Order Qty
24
Removal Rating
70 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Nexis® A Series Filter Cartridges, Polypropylene, Length 20 inches, DOE industrial

Product ID: NXA720U
Unit of Measure
12/EA
Min Order Qty
12
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
End Configuration Code
BLANK
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps)

Product ID: NXT1020U42
Unit of Measure
10/EA
Min Order Qty
20
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 120 μm, Polypropylene, Length 20 inches

Product ID: NXT12020U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
120 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 15 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: NXT1520UH21
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
15 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 20 inches product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 20 inches

Product ID: NXT20020U
Unit of Measure
10/EA
Min Order Qty
10
Micron
200 micron
28 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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