Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Availability

In Stock

Cartridge Length (Imperial)

30 in

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 30 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 30 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT02530UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 30 Inches, silicone, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 30 Inches, silicone, SOE fin end external 222 O-rings

Product ID: PFT04530USM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, FEP encapsulated Fluorocarbon Elastomer Orings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, FEP encapsulated Fluorocarbon Elastomer Orings

Product ID: PFT0830UFM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, silicone, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, silicone, SOE fin end external 226 O-rings

Product ID: PFT230USM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 Inches, Nitrile

Product ID: PFT3030UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches, Timonium

Product ID: R3F400TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration
R type housing
See All Attributes
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXA130UM3S
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron

Nexis® T Filter Cartridges, Removal Rating 120 μm, Polypropylene, Length 30 inches

Product ID: NXT12030U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
120 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches

Product ID: NXT130U916
Unit of Measure
240/EA
Min Order Qty
240
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT5030UM7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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HDC® II, Filter Cartridges, Removal Rating 2.5 μm, Length 30 Inches

Product ID: AB3J0257H4
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
2.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes

HDC® II, Filter Cartridges, Removal Rating 4.5 μm, Length 30 Inches, silicone

Product ID: AB3J0457H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
4.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes
31 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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