Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 36in 91.44cm

Product ID: HC2296FKS36H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC9601FDP8H#28
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9601
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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PCCMV2-MGR product photo

PCCM ST Stell Grid Reinforced

Product ID: PCCMV2-MGR
Unit of Measure
1/EA
Min Order Qty
1

TRANSFORMER FOR PCC 120/220V 4000VA

Product ID: PCCTRANSFORMER
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.
FILTER CAPSULE product photo

FILTER CAPSULE

Product ID: PCF1Y100N04
Unit of Measure
1/EA
Min Order Qty
1
PCM500WUC MONITOR CLEANLINESS product photo

PCM500WUC MONITOR CLEANLINESS

Product ID: PCM500WUC
Unit of Measure
1/EA
Min Order Qty
1
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HOUSING PCY2RFG16HY

Product ID: PCY2RFG16HY
Unit of Measure
1/EA
Min Order Qty
1

PDF .25-PFT 0.45-10U

Product ID: PDF25PFT04510U
Unit of Measure
1/EA
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1

ASSEMBLY, FLOAT

Product ID: PE00440500
Unit of Measure
1/EA
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1

Vector™ Large Format Filters, Removal Rating 100 μm, Polyester, Size 2 cartridge

Product ID: PEV1002UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
100 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 100 μm, Polyester, Size 2 cartridge, Nitrile

Product ID: PEV1002UNPFA
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 2 cartridge
Filter Grade
100 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Discontinued

This part is no longer available. Please contact us for more information.

Vector™ Large Format Filters, Removal Rating 10 μm, Polyester, Size 2 cartridge, FluorocarbonElastomer, Plastic self-adjusting flange

Product ID: PEV102UVPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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7,658 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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