Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Microelectronics

Availability

In Stock

Claris, Polypropylene, 75 micron, 9.875 inch product photo

Claris, Polypropylene, 75 micron, 9.875 inch

Product ID: CLR759875
Unit of Measure
36/EA
Min Order Qty
36
Length
25.1 cm / 9.875 in
Micron
75 micron

AB2P70018JDUP

Product ID: AB2P70018JDUPTIMMD
Unit of Measure
1/EA
Min Order Qty
1

AB2UUA7H4

Product ID: AB2UUA7H4
Unit of Measure
1/EA
Min Order Qty
1
C050A10U product photo

C050A10U

Product ID: C050A10U
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
K3A20U-1PK 430 product photo

K3A20U-1PK 430

Product ID: K3A20U1PK430
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
See All Attributes

Filter 10" HDC II 6µm

Product ID: MCY1001J060J
Unit of Measure
24/EA
Min Order Qty
24

MPF2230F002EH1

Product ID: MPF2230F002EH1
Unit of Measure
1/EA
Min Order Qty
1
NXT 5-10U-DOET product photo

Nexis, NXT, 5 μm, 25.4 cm (10 in), DOE with elastomer gasket seals and end caps, Expanded PTFE (gaskets) - DOE option FEP encapsulated silicone (O-rings) - SOE option

Product ID: NXT510UDOET
Unit of Measure
60/EA
Min Order Qty
60
Micron
5 micron
J,304L,18X48 product photo

J,304L,18X48

Product ID: P1174041
Unit of Measure
1/IN2
Min Order Qty
1
PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, EPDM, M3 product photo

PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, EPDM, M3

Product ID: PFT0210UEM3513
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm

R4F050

Product ID: R4F050TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

R3F700

Product ID: R3F700TIMONIUM
Unit of Measure
48/EA
Min Order Qty
48
37 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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