Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Microelectronics

Availability

In Stock

C050A10U product photo

C050A10U

Product ID: C050A10U
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: CLR120H21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
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Claris, Polypropylene, 20 micron, 20 inch product photo

20µm, 20", DOE (no seal)

Product ID: CLR2020
Unit of Measure
24/EA
Min Order Qty
24
Length
50.8 cm / 20 in
Micron
20 micron
Claris, Polypropylene, 75 micron, 9.875 inch product photo

Claris, Polypropylene, 75 micron, 9.875 inch

Product ID: CLR759875
Unit of Measure
36/EA
Min Order Qty
36
Length
25.1 cm / 9.875 in
Micron
75 micron
PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, EPDM, M3 product photo

PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, EPDM, M3

Product ID: PFT0210UEM3513
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm

PUY01ZU010ZJ

Product ID: PUY01ZU010ZJ
Unit of Measure
1/EA
Min Order Qty
1

CRTG PUY1J006J

Product ID: PUY1J006J
Unit of Measure
1/EA
Min Order Qty
1

R2F020

Product ID: R2F020TIMONIUM
Unit of Measure
24/EA
Min Order Qty
48

R2F050

Product ID: R2F050TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24

R3F030

Product ID: R3F030TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24

R3F200

Product ID: R3F200TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24

R3F700

Product ID: R3F700TIMONIUM
Unit of Measure
48/EA
Min Order Qty
48
40 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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