Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Oil & Gas

RT250A10S product photo

RT250A10S

Product ID: RT250A10S
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT1040UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches

Product ID: NXT310U
Unit of Measure
30/EA
Min Order Qty
30
Micron
3 micron
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Polypropylene, FluorocarbonElastomer product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Polypropylene, FluorocarbonElastomer

Product ID: C001AW30UVM3
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 29.5 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 29.5 Inches, 316 stainless steel

Product ID: C075AW295S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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ELEMENT 12” U2-20Z 2 MICRON

Product ID: CA24762D07
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

ELEMENT 12” U010Z 1 MICRON

Product ID: CA24762D06
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CC2LGA7H13

Product ID: CC2LGA7H13
Unit of Measure
12/EA
Min Order Qty
12
Coalescer Length (Imperial)
20 in
Coalescer Length (Metric)
50.8 cm
Coalescer Diameter (Imperial)
2.75 in

CC3LGA7J

Product ID: CC3LGA7J
Unit of Measure
12/EA
Min Order Qty
12
Coalescer Length (Imperial)
30 in
Coalescer Length (Metric)
76.2 cm
Coalescer Diameter (Imperial)
2.75 in
SepraSol - CC3LGB7H13 product photo

SepraSol L/G Coalescer, 30in length, 2.75in diameter, 99.999% at 0.3µm aerosol rating, 99.99% >0.3µm solids removal rating

Product ID: CC3LGB7H13
Unit of Measure
1/EA
Min Order Qty
1

CC3LGB7H

Product ID: CC3LGB7H
Unit of Measure
12/EA
Min Order Qty
12
Coalescer Length (Imperial)
30 in
Coalescer Length (Metric)
76.2 cm
Coalescer Diameter (Imperial)
2.75 in

SepraSol Plus L/G Coalescer, 40in length, 6in diameter, 99.999% at 0.3µm aerosol rating, 99.7% >0.3µm solids removal rating

Product ID: CS604LGDH13
Unit of Measure
12/EA
Min Order Qty
12
Maximum Operating Temperature (F)
180 °F
Maximum Operating Temperature (C)
82 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
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880 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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