Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 36in 91.44cm

Product ID: HC2296FKS36H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC9601FDP8H#28
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9601
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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RT250A10S product photo

RT250A10S

Product ID: RT250A10S
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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FMT-800

Product ID: FMT800
Unit of Measure
1/EA
Min Order Qty
1

FMT-800L

Product ID: FMT800L
Unit of Measure
1/EA
Min Order Qty
1
FILTER product photo

FILTER

Product ID: FNC10R30P
Unit of Measure
30/EA
Min Order Qty
30

Discontinued

This part is no longer available. Please contact us for more information.

STRINGWOUND FILTER

Product ID: FNC50R30T
Unit of Measure
1/EA
Min Order Qty
1
FNC10R40SE product photo

FNC10R40SE

Product ID: FNC10R40SE
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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String wound 50 micron filter product photo

String wound 50 micron filter

Product ID: FNC50R40TE
Unit of Measure
10/EA
Min Order Qty
10

Cartridge, Stringwound, Nylon, 5 um, 30

Product ID: FP FNY5R30A-E
Unit of Measure
15/EA
Min Order Qty
15

RING BK UP -235 PARKER

Product ID: FP390692
Unit of Measure
1/EA
Min Order Qty
1

RING BK UP -130 PARKER

Product ID: FP390691
Unit of Measure
1/EA
Min Order Qty
1
9,834 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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