Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 36in 91.44cm

Product ID: HC2296FKS36H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC9601FDP8H#28
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9601
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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RT250A10S product photo

RT250A10S

Product ID: RT250A10S
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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S60141H550-100-W product photo

S60141H550-100-W

Product ID: S60141H550100W
Unit of Measure
1/EA
Min Order Qty
1

S70171HSP1-W

Product ID: S70171HSP1W
Unit of Measure
1/EA
Min Order Qty
1
S70171H550-100 product photo

S70171H550-100

Product ID: S70171H550100
Unit of Measure
1/EA
Min Order Qty
1
S70172FS100-075-3M-2 product photo

S70172FS100-075-3M-2

Product ID: S70172FS1000753M2
Unit of Measure
1/EA
Min Order Qty
1
FEATURED

Junior Filter Emflon PFR 0.2µm

Product ID: SBF1PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
410 cm²
Filter Cartridge Style
SBF-style junior
Cartridge Length (Imperial)
10 in
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SC025AW30T product photo

SC025AW30T

Product ID: SC025AW30T
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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Supracap™ 50 depth filter capsule with single-layer media grade SUPRA 80P (1-3 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade SUPRA 80P (1-3 µm retention rating) and luer-lock connections

Product ID: SC050P080
Unit of Measure
1/EA
Min Order Qty
1
Retention Rating
1-3 µm
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
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Supracap™ 50 depth filter capsule with single-layer media grade K100P (1-3 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade K100P (1-3 µm retention rating) and luer-lock connections

Product ID: SC050P100
Unit of Measure
1/EA
Min Order Qty
1
Retention Rating
1-3 µm
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
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Supracap™ 50 depth filter capsule with single-layer media grade BIO 20 (0.4-1 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade BIO 20 (0.4-1 µm retention rating) and luer-lock connections

Product ID: SC050B020
Unit of Measure
1/EA
Min Order Qty
1
Retention Rating
0.4-1.0 µm
Membrane Material
Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
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9,822 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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