Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

In Stock

Product Type

Filter Cartridges

FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 13 inches

Product ID: HC9604FRN13H
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
7 µm
Membrane Material
Glass Fiber

Duo-Fine®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches

Product ID: DFPT1020ETM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
M3
End Configuration
SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0) 3
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FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 12 μm, GlassFiber, Length 4 Inches

Product ID: HCG200FRS4Z
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
12 µm
Membrane Material
Glass Fiber

MCY4463J200H13

Product ID: MCY4463J200H13
Unit of Measure
12/EA
Min Order Qty
12

PF 2-30AE

Product ID: PF230AE
Unit of Measure
1/EA
Min Order Qty
1
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 10 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 10 Inches, Nitrile

Product ID: PFT210UN
Unit of Measure
30/EA
Min Order Qty
30
Micron
2 µm

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches, Timonium

Product ID: R3F400TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration
R type housing
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 19.5 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 19.5 Inches, 316 stainless steel, Bulk packaging

Product ID: RT001AW195S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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WCN150HFU618UY020JU

Product ID: WCN150HFU618S00001
Unit of Measure
4/EA
Min Order Qty
4

CTRG PROFILE R4F 100 ECO TEC 12684

Product ID: 12684
Unit of Measure
9/EA
Min Order Qty
9

1P30A

Product ID: 1P30A
Unit of Measure
20/EA
Min Order Qty
20

25RPN19.5

Product ID: 25RPN195
Unit of Measure
18/EA
Min Order Qty
18
563 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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