Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Housings, Vessels, and Assemblies

Family

Athalon

UH210A1608ZG ASSY HOUSING

Product ID: UH210A1608ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: UH210A1608ZGH
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.25in Manifold Mount, 8in Length, Fluorocarbon Seals

Product ID: UH210K2008ZG3
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.25in BSP Ports, 20in Length, Fluorocarbon Seals

Product ID: UH310C2020ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 2in Flange Ports, 20in Length, Fluorocarbon Seals

Product ID: UH310E3220ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
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Athalon, 600psi Simplex Hsg, 1in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: UR210A1608ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

UR210A1608ZG ASSY HOUSING

Product ID: UR210A1608ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Non-bypass Simplex Hsg, 1in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: UR210C1608ZN
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 1600psi Duplex Hsg, 1.25in BSP Ports, 13in Length, Fluorocarbon Seals

Product ID: UR229CC2013ZS00001
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
1600 psi
Port Size
1.25 in
Number of Cartridges
1 per side
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UR310A2413ZG ASSY HOUSING

Product ID: UR310A2413ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 1.5in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: UR310A2408ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

UR310A2413ZN ASSEMBLY HOUSING

Product ID: UR310A2413ZN
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes
426 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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