Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

In Stock

Product Use

Pre-Filtration

NXA 1-10U-M3E product photo

Nexis, NXA, 1 μm, 25.4 cm (10 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA110UM3E
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXA130UH21
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXA130U
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXA130UM3S
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
NXA 2-20U-M3E product photo

Nexis, NXA, 2 μm, 50.8 cm (20 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA220UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
2 micron
Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 20 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 20 inches

Product ID: NXA4020U
Unit of Measure
12/EA
Min Order Qty
12
Micron
40 micron
PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, EPDM, M3 product photo

PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, EPDM, M3

Product ID: PFT0210UEM3513
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 4 Inches, Fluorocarbon Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 4 Inches, Fluorocarbon Elastomer

Product ID: PFT024UV
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE flat closed end external 222 O-rings

Product ID: PFT02510UTM3
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.25 µm
Poly-Fine® II Filter Cartridge, PFT02510USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT02510USM7W480

Product ID: PFT02510USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, EPDM product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, EPDM

Product ID: PFT02520UEM7270
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, Silicone Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, Silicone Elastomer

Product ID: PFT02520USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.25 µm
75 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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