Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Inlet Configuration

1-1½ in (25-38 mm) sanitary flange

Emflon® PFR Membrane in Kleenpak™ Capsules takes advantage of PTFE membranes that are both pleated and hydrophobic. PFR filters meet the increasingly high standards of the biopharmaceutical industry. Pall provides top filtration of liquids for particulate removal. Robust design features a glue free construction and polypropylene shell to provide a long service life.

Emflon® II Membrane in Kleenpak™ Capsules serves the user's specific systematic needs. Pall offers options including gama-irradiatable, pre-sterilized and custom-made sets. All versions perform to the same top quality standard. Each unit is fully integrity testable and has the highly retentive Emflon II membrane. These capsule filters provide high air flows of both air and gas.

11 Products In Family

Fluorodyne® II DFL Membrane in Kleenpak™ Capsules provides many benefits to their users such as high protein transmission and rapid preservative recovery. DFL is ideal for sterilizing filtration of biopharmaceutical grade fluids. Solutions with active ingredients are carefully filtered throughout DFL's compact design. Each product includes a Certificate of Test for bacterial retention and fabrication integrity.

21 Products In Family

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 400 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 400 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation

Product ID: KA1DFLP1G
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
400 cm²
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Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 400 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation product photo
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
400 cm²
See All Attributes
Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 380 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 380 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation

Product ID: KA1V002PV1G
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
380 cm²
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Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation product photo
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
800 cm²
See All Attributes
Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 380 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 380 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation

Product ID: KA1V002PV1S
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
380 cm²
See All Attributes
Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation

Product ID: KA2DFLP1G
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
800 cm²
See All Attributes
Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 820 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 820 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation

Product ID: KA2V002PV1S
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
820 cm²
See All Attributes
Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 820 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 820 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation

Product ID: KA2V002PV1G
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
820 cm²
See All Attributes
KA3DFLP1S product photo

Kleenpak Fluorodyne II 0.2um

Product ID: KA3DFLP1S
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
1500 cm²
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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