Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

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Filter Media

Polypropylene

Nexis® T Filter Cartridges, Removal Rating 120 μm, Polypropylene, Length 9.75 inches

Product ID: NXT120975U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
120 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps) product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps)

Product ID: NXT540U
Unit of Measure
10/EA
Min Order Qty
10
Micron
5 micron

Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches, Timonium

Product ID: R2F200TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration
R type housing
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Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches, Timonium

Product ID: R3F400TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration
R type housing
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Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches, Timonium

Product ID: R2F400TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration
R type housing
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: ARD1010UEDOE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: ARD1010UEM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Claris® Filter Cartridge, 10 µm, 40 in, Single Open Ended with Fin End and External 222 O-rings

Product ID: CLR1040M8WE480
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Ethylene Propylene Rubber
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, EPDM

Product ID: CLR120M8E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 222 O-rings

Product ID: CLR120M8S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 29.75 inches product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 29.75 inches

Product ID: CLR12975
Unit of Measure
24/EA
Min Order Qty
24
Length
75.6 cm / 29.75 in
Micron
1 micron

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings

Product ID: CLR130M7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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89 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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