Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Use

Pre-Filtration

NXT 10-10U-M3F product photo

Nexis, NXT, 10 μm, 25.4 cm (10 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), FEP encapsulated fluorocarbon elastomer (O-rings)

Product ID: NXT1010UM3F
Unit of Measure
60/EA
Min Order Qty
60
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT1040UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches

Product ID: NXT310U
Unit of Measure
30/EA
Min Order Qty
30
Micron
3 micron
Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 40 inches product photo

Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 40 inches

Product ID: NXT4040U
Unit of Measure
20/EA
Min Order Qty
20
Micron
40 micron
Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 19.5 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 19.5 inches

Product ID: CLR30195
Unit of Measure
24/EA
Min Order Qty
24
Length
49.5 cm / 19.5 in
Micron
30 micron
Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.875 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.875 inches

Product ID: CLR209875
Unit of Measure
36/EA
Min Order Qty
36
Length
25.1 cm / 9.875 in
Micron
20 micron
Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 19.5 inches product photo

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 19.5 inches

Product ID: CLR75195
Unit of Measure
24/EA
Min Order Qty
24
Length
49.5 cm / 19.5 in
Micron
75 micron
NXA 0.5-10U-M7S product photo

Nexis, NXA, 0.5 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), Silicone gasket

Product ID: NXA0510UM7S
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
NXA 0.5-20U-DOEE product photo

Nexis, NXA, 0.5 μm, 50.8 cm (20 in), DOE with elastomer gasket seals and end caps, EPDM gasket

Product ID: NXA0520UDOEE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron
NXA 0.5-10U-DOEE product photo

Nexis, NXA, 0.5 μm, 25.4 cm (10 in), DOE with elastomer gasket seals and end caps, EPDM gasket

Product ID: NXA0510UDOEE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, silicone product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, silicone

Product ID: NXA0510UM3S
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: NXA0520UH21
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.5 micron
295 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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