Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Gasket / O-Ring Material

FEP encapsulated fluorocarbon elastomer (O-rings)

Filter Media

Polypropylene

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, FEP encapsulated fluorocarbon elastomer Orings

Product ID: NXA0510UM3F
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, FEP encapsulated Fluorocarbon Elastomer Orings product photo

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, FEP encapsulated Fluorocarbon Elastomer Orings

Product ID: NXT0530UM26F
Unit of Measure
24/EA
Min Order Qty
24
Micron
0.5 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 16.25 inches

Product ID: NXT101625UM3F
Unit of Measure
24/EA
Min Order Qty
24
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings

Product ID: NXT1020UM3F
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 16.25 inches

Product ID: NXT2001625UM3F
Unit of Measure
24/EA
Min Order Qty
24
Micron
200 micron
Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 16.25 inches

Product ID: NXT251625UM3F
Unit of Measure
12/EA
Min Order Qty
12
Micron
25 micron
Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 16.25 inches

Product ID: NXT301625UM3F
Unit of Measure
24/EA
Min Order Qty
24
Micron
30 micron

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE fin end external 226 O-rings

Product ID: NXT3030UM7F
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings

Product ID: NXT510UM3F
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 16.25 inches

Product ID: NXT51625UM3F
Unit of Measure
24/EA
Min Order Qty
24
Micron
5 micron

Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings

Product ID: NXT7510UM3F
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
75 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 16.25 inches

Product ID: NXT751625UM3F
Unit of Measure
24/EA
Min Order Qty
24
Micron
75 micron
28 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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