Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Cartridge Length (Imperial)

9.75 in

Product Type

Filter Cartridges

Filter Media

Polypropylene

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT045975UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm

Discontinued

This part is no longer available. Please contact us for more information.

Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 9.75 inches

Product ID: NXA3975U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 226 O-rings

Product ID: PFT10975UEM6
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 9.75 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 9.75 Inches, EPDM, DOE industrial

Product ID: PFT045975UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 9.75 inches

Product ID: NXT3975U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 15 μm, Polypropylene, Length 9.75 inches

Product ID: NXT15975U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
15 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 9.75 inches

Product ID: NXT1975U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 9.75 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 9.75 Inches, EPDM, DOE industrial

Product ID: PFT10975UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 inches

Product ID: CLR30975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
30 micron

Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 9.75 inches

Product ID: NXT25975U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
25 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 9.75 inches, DOE Santoprene gasket seal

Product ID: NXT3975UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT30975UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm

Discontinued

This part is no longer available. Please contact us for more information.
49 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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