Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Cartridge Length (Imperial)

10 in

Product Use

Pre-Filtration

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE fin end external 226 O-rings

Product ID: PFTQ510UTM712
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial, Bulk packaging product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial, Bulk packaging

Product ID: PFT04510UNBBLK
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial

Product ID: PFT02510UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches

Product ID: CLR510
Unit of Measure
36/EA
Min Order Qty
36
Length
25.4 cm / 10 in
Micron
5 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 222 O-rings

Product ID: PFT0810USM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 Inches, silicone, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 Inches, silicone, SOE flat closed end external 222 O-rings

Product ID: PFT5010USM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
50 µm

Discontinued

This part is no longer available. Please contact us for more information.
Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring

Product ID: NXT5010UM18F
Unit of Measure
30/EA
Min Order Qty
30
Micron
50 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 226 O-rings

Product ID: PFT310USM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, DOE industrial (no end caps)

Product ID: NXA510U
Unit of Measure
30/EA
Min Order Qty
30
Micron
5 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial

Product ID: PFT510UE
Unit of Measure
30/EA
Min Order Qty
30
Micron
5 µm
Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches product photo

Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches

Product ID: CLR5010
Unit of Measure
36/EA
Min Order Qty
36
Length
102 cm / 40 in
Micron
50 micron
Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 10 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 10 inches

Product ID: NXA4010U
Unit of Measure
30/EA
Min Order Qty
30
Micron
40 micron
206 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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