Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Microelectronics

Product Use

Pre-Filtration

Claris, Polypropylene, 75 micron, 20 inch product photo

75um, 20", DOE

Product ID: CLR7520
Unit of Measure
24/EA
Min Order Qty
24
Length
50.8 cm / 20 in
Micron
75 micron
NXA 0.5-20U-M3E product photo

Nexis, NXA, 0.5 μm, 50.8 cm (20 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA0520UM3E
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron
NXA 1-10U-M3S product photo

Nexis, NXA, 1 μm, 25.4 cm (10 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), Silicone gasket

Product ID: NXA110UM3S
Unit of Measure
30/EA
Min Order Qty
30
Micron
1 micron
NXA 5-20U-M3E product photo

Nexis, NXA, 5 μm, 50.8 cm (20 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA520UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron
NXT 150-20U product photo

Nexis, NXT, 150 μm, 50.8 cm (20 in), DOE industrial (no end caps)

Product ID: NXT15020U
Unit of Measure
10/EA
Min Order Qty
10
Micron
150 micron
NXA 0.5-20U-DOEE product photo

Nexis, NXA, 0.5 μm, 50.8 cm (20 in), DOE with elastomer gasket seals and end caps, EPDM gasket

Product ID: NXA0520UDOEE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron
NXA 3-20U-M3E product photo

Nexis, NXA, 3 μm, 50.8 cm (20 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA320UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
3 micron
NXA 10-29.25U-DOEV product photo

Nexis, NXA, 10 μm, 74.3 cm (29.25 in), DOE with elastomer gasket seals and end caps, Fluorocarbon Elastomer gasket

Product ID: NXA102925UDOEV
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 micron
NXT 100-30U-M7E product photo

Nexis, NXT, 100 μm, 76.2 cm (30 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), EPDM gasket

Product ID: NXT10030UM7E
Unit of Measure
1/EA
Min Order Qty
1
Micron
100 micron
NXA 1-20U-M8E product photo

Nexis, NXA, 1 μm, 50.8 cm (20 in), SOE fin end, external 222 O-rings (retrofits other manufacturers’ Code 5), EPDM gasket

Product ID: NXA120UM8E
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
NXA 30-19.75U-H21 product photo

Nexis, NXA, 30 μm, 50.2 cm (19.75 in), DOE, Santoprene gasket seal

Product ID: NXA301975UH21
Unit of Measure
12/EA
Min Order Qty
12
Micron
30 micron
NXT 40-10U-M7S product photo

Nexis, NXT, 40 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), Silicone gasket

Product ID: NXT4010UM7S
Unit of Measure
1/EA
Min Order Qty
1
Micron
40 micron
67 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English