Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Sub Type

Pleated Filters

Product Type

Filter Cartridges

Junior Filter HDC II 4.5µm

Product ID: MCY4463J045H4
Unit of Measure
12/EA
Min Order Qty
12
ELEMENT 2 3/4" U010Z 1 MICRON product photo

ELEMENT 2 3/4" U010Z 1 MICRON

Product ID: CN05870C08
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Junior Filter HDC II 1.2µm

Product ID: MCY4463J012J
Unit of Measure
12/EA
Min Order Qty
12

5ESC10770-4U200ZJ-010

Product ID: 5ESC107704U2S00001
Unit of Measure
1/EA
Min Order Qty
1

5ESC10770-3U010Z-140

Product ID: 5ESC107703U010Z140
Unit of Measure
1/EA
Min Order Qty
1

Junior Filter Ultipor GF+ 2µm

Product ID: MCY4463U2-20ZH4
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Duo-Fine® II, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFNT130UE
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration
Blank - DOE with elastomer gasket seals & end caps
Change Out Differential Pressure
2.4 bard
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HDC® II, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, silicone

Product ID: AB3J1007H4
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
10 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes

5ESC10770-5U2-20ZJ-004

Product ID: 5ESC107705U2S00001
Unit of Measure
1/EA
Min Order Qty
1

Junior Filter HDC II 40µm

Product ID: MCY4463J400H4
Unit of Measure
12/EA
Min Order Qty
12

QMPT 010-300UE

Product ID: QMPT010300UE
Unit of Measure
60/EA
Min Order Qty
60
Poly-Fine® II Filter Cartridge, PFT520USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT520USM7W480

Product ID: PFT520USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
747 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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