Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Cartridge Length (Imperial)

10 in

Gasket / O-Ring Material

EPDM

Product Use

Pre-Filtration

Filter Media

Polypropylene

Poly-Fine® II, Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial

Product ID: PFT10010UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT04510UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, EPDM, DOE with elastomer gasket seals and end caps product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXA2010UDOEE
Unit of Measure
1/EA
Min Order Qty
1
Micron
20 micron
NXA 120-10U-M7E product photo

Nexis, NXA, 120 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), EPDM gasket

Product ID: NXA12010UM7E
Unit of Measure
1/EA
Min Order Qty
1
Micron
120 micron
Poly-Fine® II Filter Cartridge, PFT510UEW480 product photo

Poly-Fine® II Filter Cartridge, PFT510UEW480

Product ID: PFT510UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT02510UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial

Product ID: PFT210UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm
Poly-Fine® II Filter Cartridge, PFT0810UEW480 product photo

Poly-Fine® II Filter Cartridge, PFT0810UEW480

Product ID: PFT0810UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT210UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm
NXT 0.5-10U-M7E product photo

Nexis, NXT, 0.5 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), EPDM gasket

Product ID: NXT0510UM7E
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT5010UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
50 µm
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, EPDM product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, EPDM

Product ID: NXA0510UM7E
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron
47 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English