Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Gasket / O-Ring Material

NA

Cartridge Length (Metric)

254 mm

Filter Media

Polypropylene

Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXA310UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 10 inches

Product ID: NXT15010U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
150 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
See All Attributes
Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches

Product ID: CLR2010
Unit of Measure
36/EA
Min Order Qty
36
Length
25.4 cm / 10 in
Micron
20 micron

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXT10010UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXT20010UH21
Unit of Measure
30/EA
Min Order Qty
30
Micron
200 micron
Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches

Product ID: NXT110U
Unit of Measure
30/EA
Min Order Qty
30
Micron
1 micron

Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXT15010UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
150 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches

Product ID: NXT510U
Unit of Measure
30/EA
Min Order Qty
30
Micron
5 micron

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXT1010UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 15 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 15 μm, Polypropylene, Length 10 inches

Product ID: NXT1510U
Unit of Measure
30/EA
Min Order Qty
30
Micron
15 micron

Nexis® A Series Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches

Product ID: NXA5010U
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, DOE industrial (no end caps)

Product ID: NXA2010U
Unit of Measure
30/EA
Min Order Qty
30
Micron
20 micron
56 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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