Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Sub Type

Pleated Depth Filters

Product Type

Filter Cartridges

Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches, EPDM

Product ID: XLD310UEM3BLK490
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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PUY1UY200H

Product ID: PUY1UY200H
Unit of Measure
1/EA
Min Order Qty
1

5µm, 10", DOE w/seal

Product ID: MCY1001A050J
Unit of Measure
1/EA
Min Order Qty
1

Poly-Fine® XLD Filter Cartridges, Polypropylene, Length 10 inches, EPDM, DOE industrial

Product ID: XLD3010UE
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
End Configuration Code
Blank
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PRS200H21

Product ID: PRS200H21
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Poly-Fine® XLD Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: XLD1010UEM3165
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Discontinued

This part is no longer available. Please contact us for more information.

Filter 10" Profile Star 20µm

Product ID: AB1A2007H4
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: XLD320UEM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
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Poly-Fine® XLD Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, FEP encapsulated fluorocarbon elastomer Orings, SOE fin end external 226 O-rings

Product ID: XLD1030UFM7
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
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Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, FEP encapsulated fluorocarbon elastomer Orings, SOE flat closed end external 222 O-rings

Product ID: XLD320UFM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
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Profile® Star Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, Ethylene Propylene, double O-ring with flat end

Product ID: AB2A0303J
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 3
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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AB4UY10018J

Product ID: AB4UY10018J
Unit of Measure
1/EA
Min Order Qty
1
210 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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