Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Claris®

Product Type

Filter Cartridges

Cartridge Length (Metric)

251 mm

Filter Media

Polypropylene

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 9.875 inches

Product ID: CLR109875
Unit of Measure
72/EA
Min Order Qty
72
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 9.875 inches

Product ID: CLR19875
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 9.875 inches

Product ID: CLR509875
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 9.875 inches

Product ID: CLR59875
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
See All Attributes
4 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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