Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Claris®

Availability

In Stock

Product Type

Filter Cartridges

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings

Product ID: CLR530M7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridge, CLR130W480

Product ID: CLR130W480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket O-Ring Code
Blank
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings

Product ID: CLR520M7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridge, 10 µm, 40 in, Single Open Ended with Fin End and External 222 O-rings

Product ID: CLR1040M8WE480
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Ethylene Propylene Rubber
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps), Polypropylene Core

Product ID: CLR540M3HN
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Change Out Differential Pressure
2.4 bard
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AVS5M30

Product ID: AVS5M30
Unit of Measure
24/EA
Min Order Qty
24

Claris® Filter Cartridge, 1 µm, 30 in, Single Open End with Fin End, 2 Locking Tabs and External 226 O-rings

Product ID: CLR130M7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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MPCL 1-30E-FIN

Product ID: MPCL130EFIN
Unit of Measure
12/EA
Min Order Qty
12

AVS20M30

Product ID: AVS20M30
Unit of Measure
24/EA
Min Order Qty
24

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, Nitrile, SOE fin end external 222 O-rings

Product ID: CLR540M8N
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, EPDM

Product ID: CLR120M8E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
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Claris, Polypropylene, 50 micron, 29.25 inch product photo

Claris, Polypropylene, 50 micron, 29.25 inch

Product ID: CLR502925
Unit of Measure
12/EA
Min Order Qty
12
Length
74.3 cm / 29.25 in
Micron
50 micron
26 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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