Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

HDC®

Industries

Industrial Manufacturing

Product Type

Filter Cartridges

MCY1001J045H2

Product ID: MCY1001J045H2
Unit of Measure
24/EA
Min Order Qty
24

This product is currently not available. Please contact us for more information.

Filter 10" HDC II 4.5µm

Product ID: MCY1001J045H13
Unit of Measure
1/EA
Min Order Qty
1

HDC II 1.2 micron MCY junior style filter

Product ID: MCY4463J012H
Unit of Measure
12/EA
Min Order Qty
12

CRTG MCY4463J400H

Product ID: MCY4463J400H
Unit of Measure
24/EA
Min Order Qty
24

FILTER CART

Product ID: AB4J0127H
Unit of Measure
1/EA
Min Order Qty
1

Junior Filter HDC II 70µm

Product ID: MCY4463J700J
Unit of Measure
12/EA
Min Order Qty
12

Filter 10" HDC II 10µm

Product ID: AB1J1003H1
Unit of Measure
6/EA
Min Order Qty
6
Junior Filter HDC II 70µm product photo

Junior Filter HDC II 70µm

Product ID: MCY4463J700H4
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Junior Filter HDC II 2.5µm

Product ID: MCY4463J025H13
Unit of Measure
12/EA
Min Order Qty
12
Filter 20" HDC II 70µm product photo

Filter 20" HDC II 70µm

Product ID: MCY1002J700H13
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CRTG DFA4201J200

Product ID: DFA4201J200
Unit of Measure
6/EA
Min Order Qty
6

Junior Filter HDC II 20µm

Product ID: MCY4463J200J
Unit of Measure
12/EA
Min Order Qty
12
135 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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