Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Nexis®

Product Type

Filter Cartridges

MPNA 20-20E

Product ID: MPNA2020E
Unit of Measure
24/EA
Min Order Qty
24

MPNA 40-40N

Product ID: MPNA4040N
Unit of Measure
24/EA
Min Order Qty
24

MPNA 40-20E

Product ID: MPNA4020E
Unit of Measure
24/EA
Min Order Qty
24

MPNT 100-14.5N

Product ID: MPNT100145N
Unit of Measure
12/EA
Min Order Qty
12

MPNT 20-30E

Product ID: MPNT2030E
Unit of Measure
12/EA
Min Order Qty
12

MPNT 150-10N

Product ID: MPNT15010N
Unit of Measure
60/EA
Min Order Qty
60

MPNT 50-14.5N

Product ID: MPNT50145N
Unit of Measure
24/EA
Min Order Qty
24

MPNT 100-10N

Product ID: MPNT10010N
Unit of Measure
30/EA
Min Order Qty
30

MPNT 50-10N

Product ID: MPNT5010N
Unit of Measure
30/EA
Min Order Qty
30

MPNT 5-40V

Product ID: MPNT540V
Unit of Measure
12/EA
Min Order Qty
12

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, FEP encapsulated fluorocarbon elastomer Orings

Product ID: NXA0510UM3F
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
See All Attributes
NXA 0.5-10U-DOEE product photo

Nexis, NXA, 0.5 μm, 25.4 cm (10 in), DOE with elastomer gasket seals and end caps, EPDM gasket

Product ID: NXA0510UDOEE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron
718 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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