Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Nexis®

Industries

Oil & Gas

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT1040UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches

Product ID: NXT310U
Unit of Measure
30/EA
Min Order Qty
30
Micron
3 micron

MPNT 20-30E

Product ID: MPNT2030E
Unit of Measure
12/EA
Min Order Qty
12
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, silicone product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, silicone

Product ID: NXA0510UM3S
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: NXA0520UH21
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.5 micron
NXA 0.5-10U-M3E product photo

Nexis, NXA, 0.5 μm, 25.4 cm (10 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA0510UM3E
Unit of Measure
60/EA
Min Order Qty
60
Micron
0.5 micron
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXA0520UM3V
Unit of Measure
24/EA
Min Order Qty
24
Micron
0.5 micron
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 inches, silicone product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 inches, silicone

Product ID: NXA0520UM7S
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.5 micron
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, EPDM product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, EPDM

Product ID: NXA0510UM7E
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, EPDM product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, EPDM

Product ID: NXA0530UDOEE
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.5 micron
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXA0530UM3S
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.5 micron
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXA0530U
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.5 micron
163 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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