Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Chemicals & Polymers

Cartridge Length (Metric)

1524 mm

Vector™ High Flow Large Format Filters, Removal Rating 10 µm, Polyester, Length 60 inches, Fluoropolymer elastomer O-ring, Acetal caps Hardware

Product ID: HFV660PE010AH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
10 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Vector™ High Flow Large Format Filters, Removal Rating 100 µm, Polyester, Length 60 inches

Product ID: HFV660PE100AHU
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
100 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Vector™ High Flow Large Format Filters, Removal Rating 5 µm, Polyester, Length 60 inches, Fluoropolymer elastomer O-ring

Product ID: HFV660PE005PH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
5 µm
Hardware Material
White polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Vector™ High Flow Large Format Filters, Removal Rating 10 µm, Polyester, Length 60 inches, Fluoropolymer elastomer O-ring

Product ID: HFV660PE010PH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
10 µm
Hardware Material
White polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Vector™ High Flow Large Format Filters, Removal Rating 5 µm, Polyester, Length 60 inches, Fluoropolymer elastomer O-ring, Acetal caps Hardware

Product ID: HFV660PE005AH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
5 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Vector™ High Flow Large Format Filters, Removal Rating 1 µm, Polypropylene, Length 60 inches

Product ID: HFV660PP001PJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
1 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Vector™ High Flow Large Format Filters, Removal Rating 10 µm, Polyester, Length 60 inches

Product ID: HFV660PE010AH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
10 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Vector™ High Flow Large Format Filters, Removal Rating 1 µm, Polyester, Length 60 inches

Product ID: HFV660PE001AH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
1 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Vector™ High Flow Large Format Filters, Removal Rating 25 µm, Polyester, Length 60 inches

Product ID: HFV660PE025AH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
25 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Vector™ High Flow Large Format Filters, Removal Rating 5 µm, Polypropylene, Length 60 inches, Fluoropolymer elastomer O-ring, Acetal caps Hardware

Product ID: HFV660PP005AH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
5 µm
Hardware Material
Acetal Caps
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Vector™ High Flow Large Format Filters, Removal Rating 5 µm, Polypropylene, Length 60 inches

Product ID: HFV660PP005PJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
5 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Vector™ High Flow Large Format Filters, Removal Rating 10 µm, Polypropylene, Length 60 inches, Fluoropolymer elastomer O-ring

Product ID: HFV660PP010PH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
10 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes
17 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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